References
Conversion of the chemical and slurry supply systems for a 200 mm production to 300 mm production during normal operation
Scope:
- Detail and construction design
- 6 new slurry mixing and supply systems
- 7 new chemical supply systems (solvents, acids, caustic)
- 108 VMB‘s
- Conversion of 15 existing supply systems during normal operation
- 9 temporary supply system incl. Day tank changing during normal operation
- All qualification and certification works (pressure test, particle test, moisture test, leach out of chemical lines, analyzing samples)
